HIGH-RESOLUTION POLYMER WAVEGUIDE DEVICES FABRICATED USING THREE-DIMENSIONAL MULTIPHOTON LITHOGRAPHY
Hongwei Gao, George F.R. Chen, Peng Xing, Ju Won Choi, Hong Yee Low, Dawn T.H. Tan
Three-dimensional polymer waveguide devices are fabricated using 3Dmultiphoton lithography, including photonic waveguides, Bragg gratings and ring resonators with sub-micron gap sizes. Error-free transmission of 30Gb/s non-return-to-zero data and 56Gb/s pulse amplitude modulation-4 data is demonstrated.